Wafer & Lead Frame Coating Thickness Measurement XDV SDD

Design

The range of Lead Frame Coating is uniquely designed with high-precision, programmable XY-stage as well as an electrically.

The user-friendly bench-top instruments are acclaimed for sample stage moves into the loading position automatically in case the protective hood is opened.

These are solid and strong range that ensure longer stability. With laser pointer works as a positioning help and support the rapid alignment of the sample to be measured.

These are carefully operated through the dominant and user-friendly WinFTM® software designed as per German regulations Deutsche R ntgenverordnung-rov". Its whole operation as well as evaluation of measurements and the clear arrangement of measurement data is performed on a PC through software.

Typical areas of application are:

• Study of very thin coatings of 0.1 m (0.004 mils)
• Measurements of practical coatings in the electronics as well as semiconductor industries
• Determination of complex multi-coating systems and lead content in solder
• Automated measurements such as quality control

General Specification

Intended use:Energy dispersive X-ray fluorescence measuring instrument (EDXRF) to determine thin coatings and alloys

Element range:Aluminum Al (13) to Uranium U (92) - up to 24 elements simultaneously

Design:Bench-top unit with hood opening upwards XY-stage and Z-axis electrically driven and programmable,Motor-driven changeable apertures and filters Video camera and laser pointer (class 1) for orienting the sample

Measuring direction:Top down

X-Ray Source

X-ray tube Micro focus tungsten tube with beryllium window

High voltage Three steps 10 kV, 30 kV, 50 kV

Aperture (Collimator):4x changeable: 0.1 mm (3.9 mils),  0.3 mm (11.8 mils),  0.6 mm (23.6 mils) slot 0.5 x 0.15 mm (19.7 x 5.9 mils), others on request

Primary filter:3x changeable (Standard configuration: Nickel, Aluminum, no filter)

Measurement spot:Depending on the measuring distance and on the aperture, the actual spot size is shown in the video image. Smallest measurement approx.  0.15 mm (5.9 mils) with aperture 0.1 mm (3.9 mils)

X-Ray Detection

X-ray detector Silicon PIN detector with peltier cooling

Resolution (fwhm for Mn-K±) 200 eV

Measurement distance:0 - 80 mm (0 - 3.2 in) Distance compensation with patented DCM method for simplified measurements at varying distances. For particular applications or for higher demands on accuracy an additional calibration might be necessary.

Sample Alignment

Video microscope High-resolution CCD color camera for monitoring of the measurement location along with the primary beam axis, auto-focus, manual focusing, crosshairs with a calibrated scale (ruler) as well as spot-indicator, adjust table LED illumination, laser pointer (class 1) to support accurate sample placement.

Zoom factorDigital 1x, 2x, 3x, 4x

Sample Stage

Design Programmable, motor-driven XY-stage

Max. sample height 140 mm (5.5 in)

Max. sample weight 5 kg, with reduced approach travel precision 20 kg

Max. travel speed 80 mm/s (3.2 in/s)

Maximum travel X/Y-axis: 255 x 235 mm (10 x 9 in); Z-axis: 140 mm (5 in)

Repeatability precision XY 0.01 mm (0.4 mils), unidirectional

Usable sample placement area Width x depth [mm]: 300 x 350 mm, [in]: 12 x 14

Electrical Data

Power consumption Max. 120 W ,without evaluation PC

Power supply AC 115 V or AC 230 V 50 / 60 Hz

Protection classIP40

Dimensions

Interior dimensions Width x depth x height [mm]: measurement chamber460 x 495 x 146 mm, [in]: 18 x 19.5 x 5.7

External dimensions Width x depth x height [mm]:570 x 760 x 650 mm, [in]: 22 x 30 x 26

Weight Approx. 115 kg (52 lb)

Environmental Conditions

Temperature Storage/Transport:0^oC - 50^oC / 32^oF - 122^oF

Temperature: Operation10^oC - 40^oC / 50^oF - 104^oF

Admissible air humidity: 95 %, non-condensing

Evaluation Unit

Computer Windows®-PC

Software Standard: Fischer Win FTM® BASIC including PDM®, Optional: Fischer WinFTM® SUPER

Standards

X-Ray standards DIN ISO 3497 and ASTM B 568

CE approval EN 61010

Approval Fully protected instrument with type approval according to the German regulations "Deutsche R ntgenverordnung-RV".